Design of a Template-Based Electrophoretically Assisted Micro-Ultrasonic Machining Micro-Channel Machine Tool and Its Machining Experiment

In order to achieve the high-precision and high-efficiency machining of micro-channels for hard brittle materials, authors innovatively proposed a new technology called template-based electrophoretically assisted micro-ultrasonic (TBEPAMUSM). This transfers micro-channel shape punch-pin workpiece material through form micro-channel. At same time, it uses electrophoretic properties ultra-fine abrasive particles ensure existence in area by applying DC electric field. According principle, machine tool TBEPAMUSM was designed developed. The hardware adopts C-shaped structure, including marble platform, an ultrasonic vibration system, micro three-dimensional motion working fluid tank, pressure sensor. intelligent control system is developed based on LabVIEW, initialization module, fast positioning constant force setting real-time coordinate display module. Micro-channels with different structures are machined single-crystal silicon soda-lime glass using system. results show that: when electrophoresis assistance applied machining, edge chipping phenomenon significantly reduced, surface roughness reduced about 20%, efficiency increased 4%.